Micro- and Nanotechnology for Space Systems

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Microengineering and microelectromechanical systems (MEMS) are a subject of considerable current interest involving research and development throughout the world. This first volume of a series on this topic reviews and evaluates micro- and nanotechnologies applicable to U.S. Air Force and commercial space systems. It introduces the concept of application-specific integrated microinstrument (ASIM), an intelligent microinstrument